Products

  • OG-5000
  • 產品廠牌: Teledyne
    產品簡述: High concentration Ozone generator
    Nation of Principal:U.S.A
    Product Application: 
    -Chemical Vapor Deposition CVD 
    -Atomic Layer Deposition ALD 
    -Oxide growth 
    -Surface conditioning 
    -Ashing 
    -Wet Processing 
    -Particle Cleaning
    Related Link:  http://teledyne.com/
    Keyword:
    Ozone/O3
製程說明
- High Purity Ozone
- Very High Ozone concentrations
- Environmentally friendlier than other process gases
- Low cost of ownership
- No consumables
- Compact and Modular
- Proven technology
- OG-5000-A Maximum Ozone Production 210g/hr
- OG-5000-B Maximum Ozone Production 150g/h