SI 500

  • BRAND: Sentech
  • DESCRIPTION: Inductively coupled plasma etching system
  • Nation of Principal:Germany
    Product Application
    Including but not limited to III-V compound semiconductors (GaAs, InP, GaN, InSb), dielectrics, quartz, glass, silicon, silicon compounds (SiC, SiGe), and metals.
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1.Low damage for nano structuring
2.Simple high rate etching
3.Inhouse ICP plasma source
4.Dynamic temperature control


  • SI 500 PPD 1.PECVD with highly process flexibility on temperature & film 2.Vacuum loadlock with cleanline..