SI 500 PPD

  • BRAND: Sentech
  • DESCRIPTION: Inductively coupled plasma etching system
  • Nation of Principal:Germany
    Product Application
    SiO2, SINx, SiOxNy, and a-Si 
                                       in a temperature range of RT 
                                       to 350 °C

    Related Link

1.PECVD with highly process flexibility on temperature & film
2.Vacuum loadlock with cleanliness of deposition processes
3.Available for the deposition of TEOS, SiC, and other materials with liquid or gaseous precursors
4.up to 200mm wafer


  • SI 500 1.Low damage for nano structuring 2.Simple high rate etching 3.Inhouse ICP plasma source 4.Dynami..