Products

  • Transportation/Robot
  • 產品廠牌: JEL
    產品簡述: Japan

    Product Application
    1. Suitable for atmosphere & vacuum environment, also available for acid or alkaline mist condition.
    2. Applied for Semi or LED wafer & FPD transportation process.
    3. Customization meet customer actual requirement.
    Related Link:
    http://www.jel-robot.co.jp

製程說明

l  Be applied for Semiconductor, LED, FPD & Touch Panel process system.
l  Be integrated EFEM, Sorter & Inspection system.
l  Repeatability within ±0.1mm to meet high accuracy requirement in transportation.
l  Cleanliness: Class 2 (ISO). Be suitable for cleanroom.
l  Vacuum resistance: 1.33 * 10-6Pa.