• 8000-CD
  • 產品廠牌: n&k
    產品簡述: Measuring the thicknesses, n index and k index, CD, depth and profiles of thin film

    Nation of Principal:U.S.A
    Product Application
    Measure the thichness, n index, k index, depth, CD and profile.
    Related Link
    Keyword:film thickness, OCD, n ,k measurement

1. The spectral range of this system is 190-1000nm
2. The measurement Spot Size is 50um
3. The system can be configured to handle 150mm or 200mm wafer
4.  The system provide non-destructive, real time measurement
5. The system provide high throughput measurements directly on the device