Products

  • Olympian
  • 產品廠牌: n&k
    產品簡述: Automated measuring the n index and k index, and thicknesses of ultra-thick and thin films, plus depths, CDs and profiles of complex 2-D and 3-D structures.

    Nation of Principal:U.S.A
    Product Application
    This fully-automated system can determine the optical properties (n and k), and thicknesses of ultra-thick and thin films, plus depths, CDs and profiles of complex 2-D and 3-D structures.
    Related Link http://www.nandk.com/
    Keyword:film thickness, OCD, n ,k measurement



製程說明
1. The spectral range of this system is 190-15000nm
2. The reflectence and transmittance measurement Spot Size are 50um and 85um
3. The system can be configured to handle 150mm, 200mm or 300mm wafer
4. The system provide non-destructive, real time measurement
5. The system provide high throughput measurements directly on the device