Products

  • TFS NX300
  • 產品廠牌: Beneq
    產品簡述: ALD system for Backside passivation layer growth of Si Solar Cell

    Nation of Principal:Finland
    Product Application
    surface passivation for c-Si
    Related Link http://www.beneq.com/
    Keyword:Atomic layer deposition, ALD

製程說明
1.modulize design for different tube set-up
2.batch deposition system
3.fully automated system
4.low temperature process
5.effectively increase efficiency
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