Products

  • MWB-12ST
  • 產品廠牌: MHI
    產品簡述:

    Nation of Principal:Japan
    Product Application:
    1.Suppose that two wafers are rigidly bonded at room temperature….such a dreamy idea is realized by SAB (Surface Activated Bonding).
    2.Wafers are irradiated with atoms or ions in a vacuum.
    3. Oxide film and absorption layers are removed and dangling bond will appear on the bonding surface.
    4. These activated surface will be bonded only by touching each other.
    Related Link:
    http://www.mhi.co.jp
    KeywordSAB bonder

製程說明
1.Suppose that two wafers are rigidly bonded at room temperature….such a dreamy idea is realized by SAB (Surface Activated Bonding).
2.Wafers are irradiated with atoms or ions in a vacuum.
3. Oxide film and absorption layers are removed and dangling bond will appear on the bonding surface.
4. These activated surface will be bonded only by touching each other.