Products

  • SI 500
  • 產品廠牌: Sentech
    產品簡述: Inductively coupled plasma etching system
    Nation of Principal:Germany
    Product Application
    Including but not limited to III-V compound semiconductors (GaAs, InP, GaN, InSb), dielectrics, quartz, glass, silicon, silicon compounds (SiC, SiGe), and metals.
    Related Linkhttp://www.sentech.de/
    Keyword:etch




製程說明
1.Low damage for nano structuring
2.Simple high rate etching
3.Inhouse ICP plasma source
4.Dynamic temperature control