Products

  • SI ALD LL
  • 產品廠牌: Sentech
    產品簡述: Atomic Layer Deposition with Loadlock
    Nation of Principal:Germany
    Product Application

    1. PEALD for sensitive substrates
    2. In situ diagnostics for process development and optimization
    3. Easy reactor cleaning
    4. Glove box system integration
    5. Cluster integration

    Related Linkhttp://www.sentech.de/
    Keyword:ALD




製程說明
SENTECH atomic layer deposition systems enable thermal and plasma enhanced operation, which can be configured for oxide, nitride, and metal deposition.