Products

  • SI 500 D
  • 產品廠牌: Sentech
    產品簡述: ICP plasma deposition system
    Nation of Principal:Germany
    Product Application

    1. Exceptional high density plasma
    2. Planar ICP plasma source
    3. Outstanding properties of deposited layers
    4. Dynamic temperature control

    Related Linkhttp://www.sentech.de/
    Keyword:PECVD




製程說明
It provides excellent performance for silane based deposition processes in Si and III-V semiconductor technology.