SI ALD LL


  • BRAND: Sentech
  • DESCRIPTION: Atomic Layer Deposition with Loadlock
  • Nation of Principal:Germany
    Product Application

    1. PEALD for sensitive substrates
    2. In situ diagnostics for process development and optimization
    3. Easy reactor cleaning
    4. Glove box system integration
    5. Cluster integration

    Related Linkhttp://www.sentech.de/
    Keyword:ALD




SENTECH atomic layer deposition systems enable thermal and plasma enhanced operation, which can be configured for oxide, nitride, and metal deposition.

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