Products

  • OptiPrime
  • 產品廠牌: n&k
    產品簡述: Measuring the thicknesses, n index and k index, CD, depth and profiles of thin film

    Nation of Principal:U.S.A
    Product Application
    Measure the thichness, n index, k index
    Related Link http://www.nandk.com/
    Keyword:film thickness, OCD, n ,k measurement



製程說明
1. The spectral range of this system is 190-1000nm
2. The measurement Spot Size is 50um
3. The system can be configured to handle 150mm, 200mm or 300mm wafer
4. The system provide non-destructive, real time measurement
5. The system provide high throughput measurements directly on the device