Products

  • 5700-CDRT
  • 產品廠牌: n&k
    產品簡述: Measuring the thicknesses, n index and k index, CD, depth and profiles of the thin film growth on the photomask

    Nation of Principal:U.S.A
    Product Application
    The automated system is designed for handling 5” or 6” square masks or up to 8” square samples and transparent wafers and can measure  thichness, n index, k index, depth, CD and profile.
    Related Link http://www.nandk.com/
    Keyword:film thickness, OCD, n ,k measurement



製程說明
1. The spectral range of this system is 190-1000nm
2. The reflectence measurement Spot Size is 50um and the transmittance measurement Spot Size is 400um
3. The automated system is designed for handling 5” or 6” square masks.
4. The system provide non-destructive, real time measurement
5. The system provide high throughput measurements directly on the device