Products

  • TFS 200
  • 產品廠牌: Beneq
    產品簡述: ALD coating for wafers, planar objects and porous bulk materials, particles ,complex 3D objects

    Nation of Principal:Finland
    Product Application
    coat planar objects, particles, porous bulk materials and complex 3D shapes with very high aspect ratio features

    Related Link http://www.beneq.com/
    Keyword:Atomic layer deposition, ALD

製程說明
1. highly flexible research platform and modulize design.
2 capacitively-coupled plasma(CCP)  is available for option
3.Process cycle time customarily less than 2 seconds
4 Hot source available, up to 500C
5 loadlock available
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