Single wafer wet etch/Cleaning tool


  • BRAND: APET
  • DESCRIPTION: wet Etch/clean process system
  • Nation of Principal:Korea
    Product Application:   wet etch、clean、stress relief、recilam process
    Related Link:http://www.apet.co.kr

1. 4~12” Wet Spin Chamber Type (customized) Manual & Semi Auto & Full Auto type.
2. Various Chemical Process
3. Specialized Dispense Nozzle(Min flow rate:0.008cc)