Tera Evaluator

  • DESCRIPTION: Thin film mearsurement
  • Nation of Principal:    Japan  
    Product Application:   
    Non patterned Wafer Surface Inspection

    Related Link:    http://www.pnp.co.jp/products_3_1e.html
    Keyword:Matching Hall effect meausrement of Si/SiC/GaN Epi thin film carrier desity/ mobility/ dopant thickness measurement

Tera Evaluator using new Thz ellisometer to measurement nontransparent think film thinkness. Non-Contact Epi-Si/Sic Surface Measurement for Carrier Density / Mobility / Dopant thickness