Products

  • P800
  • 產品廠牌: Beneq
    產品簡述: ALD system for thin film growth on wafers, glass, metal or plastic sheets, 3D objects and porous bulk materials.

    Nation of Principal:Finland
    Product Application
    Suitable substrate materials for coating include wafers, glass, metal or plastic sheets, 3D objects and porous bulk materials.

    Related Link http://www.beneq.com/




製程說明
1. Thick batch processes necessitate optimized handling of precursor source materials and advanced process waste management.
2. Process temperature:25~550℃
3. It comes equipped with a multiphase filtering system, which is capable of handling large amounts of precursors.
4. During process runs, precursorde-activation functions guarantee that the system allows no chemicals that could cause film growth.
5. Low need for maintenance