Bernoulli Chuck Characteristics: Bernoulli pad type or Cyclone pad type is able depending on the wafer condition ..
SAL3481HV 1.New type of aligner available for any material of wafer for 100 to 200mm wafer 2.High-speed, high..
GCR4280_EDGE GRIP 1.4-Axis Horizontal and Multi-Joint Type Clean Robot 2.For handling 450 mm wafer with edge grip end..
GTCR5280_300mm 1.5-Axis Horizontal and Multi-Joint Type Clean Robot for 300mm wafer 2.A twin end-effector mounted ..
GCR4210_STEPPING 1.4-Axis Horizontal and Multi-Joint Type Clean Robot GCR4000-PM 2.Designed for handling 300mm wafer..
STCR4160SN 1.New type of 4-axis cylindrical coordinate type twin-arm clean robot 2.For handling wafers from 2 ..
SCR3160CSN 1.New type of 3-axis cylindrical coordinate type single-arm clean robot 2.For handling wafers from ..
Transportation/Robot l Be applied for Semiconductor, LED, FPD & Touch Panel process system. l Be integrated EFEM, So..