APET

Cassette clean system 1. Spin spray cleaning & drying 2. Application : 2 ~ 8 ” cassette, box & cover 3. Hi..

Marangoni dry unit 1. Marangoni dry Effect 2. Corresponding warpage wafer (70um Thickness Thin Wafer 3. No water mar..

Single wafer wet etch/Cleaning tool 1. 4~12” Wet Spin Chamber Type (customized) Manual & Semi Auto & Full Auto type. 2. V..

Wet bench MgD Modification 1. Marangoni dry Effect 2. Corresponding warpage wafer (70um Thickness Thin Wafer 3. No water mar..

Wet bench 1. Marangoni dry Effect 2. Corresponding warpage wafer (70um Thickness Thin Wafer 3. No water mar..

Wet process clean system Marangoni Dryer unit 1. Superior Process Proformance. 2. Advanced Wafer DHF+Rinse+Dry . 3. Customerize design and upgra..