Wet bench MgD Modification

  • DESCRIPTION: wet Etch/clean process system
  • Nation of Principal:Korea
    Product Application:  wet etch、clean、stress relief、recilam process
    Related Link:http://www.apet.co.kr

1. Marangoni dry Effect
2. Corresponding warpage wafer (70um Thickness Thin Wafer
3. No water marker
4. No wafer breakage (dry method with surface tension of DIW)
5. No impact to metal layer
6. High WPH
7. Homemade software replaces the original software system