SENTECH

SENresearch 4.0 The SENresearch 4.0 is the new SENTECH spectroscopic ellipsometer. Every individual SENresearch 4.0 ..

SIPAR 1. Lower price, higher throughput and smaller footprint 2. Hybrid multilayers composed of uniformly..

SI ALD LL SENTECH atomic layer deposition systems enable thermal and plasma enhanced operation, which can be c..

SI 500 D It provides excellent performance for silane based deposition processes in Si and III-V semiconducto..

Etchlab 200 Etchlab 200 can accommodate a wide variety of etch processes, e.g. Si, SiO2, metals, III-V compoun..

SI 500 1.Low damage for nano structuring 2.Simple high rate etching 3.Inhouse ICP plasma source 4.Dynami..

SI 500 PPD 1.PECVD with highly process flexibility on temperature & film 2.Vacuum loadlock with cleanline..