Marangoni dry unit

  • DESCRIPTION: wafer dryer
  • Nation of Principal:Korea
    Product Application:   Wet cleaning、wafer dryer
    Related Link:

1. Marangoni dry Effect
2. Corresponding warpage wafer (70um Thickness Thin Wafer
3. No water marker
4. No wafer breakage (dry method with surface tension of DIW)
5. No impact to metal layer
6. Less consumables(N2/IPA/Chemical filter)
7. High WPH