STS - Multiplex ICP (AOE)

Vintage: 2000
Multiplex ICP etcher

System Components and Configuration
1.    Coil RF generator and matching unit
2.    VAT Isolation valve
3.    Gas box
4.    Electronics Rack
5.    Pumping System –None
6.    RF Generators:  ENI ACG10B 1kW (13.56MHz)
7.    Turbo Pump: None
8.    Clamp Type: Standard WTC
9.    Platen Type: Domed
10.  Carousel Vacuum Load lock
11.  MACs Robot: None Vacuum System