Rudolph - WS3880


Vintage: 2012
Wafer Inspection / Scanner

System Components and Configuration
1.    Bump inspection system, 12"
2.    XPort, wafer scanner, ISO class 1
3.    EFEM Outfitted with a dual arm robot
4.    XPort capable of handling:
5.    Standard wafer thicknesses (725um) down to 400 micron thickness for 12" wafers
6.    Brooks Vision 12" load ports