• DESCRIPTION: Clean Robot
  • Nation of Principal:JAPAN
    Use process:
    Product name :4-Axis Cylindrical Coordinate Clean Robot
    Environment :
    Clean room atmosphere
    Single Arm
    Operating Range:
    315mm (3rd joint center)
    Vertical Stroke:
    200mm / 300mm / 400mm / 450mm / 500mm
    Payload Capacity :
    3kgf (calculated for the arm 3rd joint)

1.New type of 4-axis cylindrical coordinate type twin-arm clean robot
2.For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
3.High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration
4.Reduced origin search time: By absolute encoder
5.Equipped with the batteryless multi-rotation absolute sensor
6.Robot replacement is available: Compatible with conventional model (installation/performance)
7.High rigidity: Payload capacity of 3kgf (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
8.Arm lineup: 100mm, 130mm, 160mm, 200mm
9.Base or flange mounting type is able according to the customer’s system layout
10.Bernoulli end-effector is available (option)
11.Power: DC24V±10% 15A    Vacuum: -53kPa or more
12.Interface:RS232C and parallel photo I/O