Products

  • OPTI-Sense 5000.
  • 產品廠牌: Teledyne
    產品簡述: End point detection for chamber clean Process

    Nation of Principal:U.S.A
    Product Application

    - Pressure Range: 0.2 -1400 Torr
    - Temperature Range: 4 – 45º C
    - Response Time: < 2 seconds
    - Analog Output Digital Interface: 0–1, 5, or 10 volt,
    factory set RS-232-C and optional GUI interface

    Related Link http://teledyne.com/
    Keyword:Ozone/O3

製程說明
- Compact size
- No moving parts
- In-situ measurement
- Analog and digital outputs
- NDIR technology
- Real time graphical user interface
- Fast response time