Cryopump & Robot
service
●Provide original JEL JAPAN standard repair kit
●Repair tools certified by JEL Japan
●Follow original JEL Japan robot repair test standard
●All kinds of robot testing platforms certified by JEL Japan
●Auto run test for over 48 hours
●Spare robot for exchange directly
●Repair tools certified by JEL Japan
●Follow original JEL Japan robot repair test standard
●All kinds of robot testing platforms certified by JEL Japan
●Auto run test for over 48 hours
●Spare robot for exchange directly