Thin film deposition tool of combining ALD and PVD for RD purpose

BRAND： Swiss Cluster
DESCRIPTION： 1. Combining ALD with PVD in an extremely compact automated system for high-throughput production of multinanolayered coatings. 2. Capable of performing both ALD and PVD without breaking the vacuum or move the samples between chambers to fabricate hundred
Nation of Principal：Switzerland
Product Application：Semiconductor
Related Link：https://www.swisscluster.com/home

ALD-PVD is a powerful technology for

- Semiconductor stack formation

- High Temperature applications

- Metamaterials

- Batteries

- Solar Cells (i.e., Perovskites)

- Mechanics

- Optics

- Medical

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