Products

  • CAT-O3-E
  • 產品廠牌: Teledyne
    產品簡述: Ozone destructor can destruct the Ozone to O2 and exhaust to the environment when process stopped

    Nation of Principal:U.S.A
    Product Application

    - CVD TEOS/Ozone
    - ALD
    - MOCVD
    Related Link http://teledyne.com/
    KeywordOzone/O3

製程說明
 - Catalyst-based ozone destruction
 - Rapid reaction time
 - Environmentally-safe byproducts
 - No consumables
 - No Maintenance
 - Simple installation
 - Capacity: 23% w/w or 350g/Nm³
 - Outlet Concentration: < 0.01ppm